Influence of Xe ion-bombardment on the substrate microstructure and the residual stresses of TiN coatings deposited by plasma reactive sputtering onto AISI 4140 steel

• Author(s): Pinto, Haroldo Cavalcanti
• Date: 2014
• Origin: Oasisbr
• Subject(s): PLASMA (MICROELETRÔNICA)
• Document Type: Journal article
• Language: English