Author(s): Cunha, Florival Moura ; Pereira, Hugo Martins ; Vieira, Eliana Maria Fernandes ; Maciel, Marino Jesus Correia ; Dores, Bernardo Santos ; Domingues, Ana R. ; Silva, Manuel Fernando Ribeiro ; Correia, J. H.
Date: 2025
Persistent ID: https://hdl.handle.net/1822/95591
Origin: RepositóriUM - Universidade do Minho
[Introduction] In the Micro Nano Fabrication Laboratory (MNFabLab) at the Center for MicroElectroMechanical Systems (CMEMS) of the University of Minho (UMinho) operation at the atomic level is done with Atomic Layer Deposition (ALD) system, which offers both thermal and plasma options for depositing oxides and nitrides materials, essential for quantum optics applications [1].[...]
