2 documents found, page 1 of 1
Effect of the admixture of N2to low pressure, low temperature H2-CH4-CO2microwa...
Dekkar, D.; Puth, A.; Bisceglia, E.; Moreira, P. W.P. [UNESP]; Pipa, A. V.; Lombardi, G.; Röpcke, J.; Van Helden, J. H.; Bénédic, F.Made available in DSpace on 2020-12-12T01:37:09Z (GMT). No. of bitstreams: 0 Previous issue date: 2020-11-04; In a distributed antenna array reactor, microwave H2-CH4-CO2 plasmas with admixture of N2 used for the low-temperature deposition of nanocrystalline diamond (NCD) films are studied by in situ infrared laser absorption spectroscopy (LAS) and optical emission spectroscopy techniques. The experiments are c...
Tribological testing of self-mated nanocrystalline diamond coatings on Si3N 4 c...
Abreu, C. S.; Amaral, M.; Oliveira, F. J.; Tallaire, A.; Bénédic, F.; Syll, O.; Cicala, G.; Gomes, J. R.; Silva, R. F.Due to their much lower surface roughness compared to that of microcrystalline diamond, nanocrystalline diamond (NCD) films are promising candidates for tribological applications in particular when deposited on hard ceramic materials such as silicon nitride (Si3N4). In the present work, microwave plasma assisted chemical vapour deposition of NCD is achieved using Ar/H2/CH4 gas mixtures on plates and ball-shaped...