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Embedded real-time processor for MEMS applications
Brito, Nuno André Manodevices over the last decades created a new field of study and leveraged the creation of whole new applications and businesses at a worldwide level. The improvements on the manufacturing precision and reliability, allowed some of these devices to be used in mission-critical equipment, such as in airbag systems. The relative low price made it available to home consumer markets, resulting in a paradigm-shift in m...
Digital platform for wafer-level MEMS testing and characterization using electr...
Brito, Nuno André Mano; Ferreira, Carlos Daniel Araújo; Alves, Filipe Manuel Serra; Cabral, Jorge; Gaspar, João; Monteiro, João L.The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics characteristics, presents some limitations to the borrowed test methods from traditional integrated circuits (IC) manufacturing. Although some improvements have been performed, this specific area still lags behind when compared to the design and manufacturing competencies developed over the last decades by the IC industry. A...
Embedded platform for generic high-order sigma-delta accelerometers testing
Brito, Nuno André Mano; Lima, Vasco António Lourenço; Alves, Filipe Manuel Serra; Cabral, Jorge; Gaspar, J.; Monteiro, João L.The transition from an open loop to a closed loop sensing approach in MEMS accelerometers is an important step towards improving the sensor noise performance, bandwidth and time responses [1]. However, this approach presents some computational challenges due to the fast nature of the mechanical part, and ultimately, the performance of the feedback circuit will establish the sensor performance limits that can be...
Performance comparison of sigma-delta modulator architectures for MEMS accelero...
Lima, Vasco António Lourenço; Brito, Nuno André Mano; Alves, Filipe Manuel Serra; Cabral, Jorge; Gaspar, J.; Rocha, Luís Alexandre MachadoA comparison between different architectures of electromechanical sigma-delta modulators applied to MEMS accelerometers is presented here. Several modulation orders (2nd to 5th) and respective gains can be selected, and controlled in real-time, and sensitivity and noise levels have been measured for demonstration of the system on a SOI (25 mu m thick active layer) fabricated accelerometer. The fully digital con...