2 documents found, page 1 of 1
Fabrication and electrical characterization of low-temperature polysilicon film...
Mota, Filipa C.; Garcia, Inês S.; Retolaza, Aritz; Santos, Dimitri E.; Sousa, Patrícia C.; Aguiam, Diogo E.; Dias, Rosana A.; Calaza, CarlosThe development of low-temperature piezoresistive materials provides compatibility with standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such material in flexible substrates, thereby expanding the potential for various device applications. This work demonstrates, for the first time, the fabrication of a 200 nm polycrystalline silicon thin film through a metal-induced crysta...
Hybrid multisite silicon neural probe with integrated flexible connector for in...
Novais, Ashley; Calaza, Carlos; Fernandes, José; Fonseca, Helder; Monteiro, Patricia; Gaspar, João; Jacinto, Luís Ricardo MonteiroMultisite neural probes are a fundamental tool to study brain function. Hybrid silicon/polymer neural probes combine rigid silicon and flexible polymer parts into one single device and allow, for example, the precise integration of complex probe geometries, such as multishank designs, with flexible biocompatible cabling. Despite these advantages and benefiting from highly reproducible fabrication methods on bot...