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Clean-Room lithographical processes for the fabrication of Graphene biosensors
Cabral, Patrícia D.; Domingues, Telma; Machado, George; Chicharo, Alexandre; Cerqueira, M. F.; Fernandes, Elisabete; Athayde, Emilia; Alpuim, P.This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivation of metallic contacts. A graphene residue-free transfer process is achieved by using a pre-transfer, sacrificia...
Date: 2020
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Origin: RepositóriUM - Universidade do Minho