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PEALD of SiNx using bis(diethylamino)silane (BDEAS) precursor with N2 plasma

Cunha, Florival Moura; Silva, Manuel Fernando Ribeiro; Correia, J. H.

Silicon nitride (SiNx) ultra-thin films are essential for semiconductor and photonic integrated circuit applications, particularly where low-temperature processing is required. This study investigated SiNx ultra-thin films deposited by plasma-enhanced atomic layer deposition (PEALD) using bis(diethylamino)silane (BDEAS) and N2 plasma, focusing on the effects of deposition parameters and plasma treatments on fil...


NAD(P)H–FAD fluorescence detection using multiphoton microscopy improved with h...

Freitas, Ruben Brandão; Rodrigues, Manuel José Lima Ferreira; Cunha, Nelssom F.; Pimenta, Sara; Belsley, Michael; Correia, J. H.; Maciel, Marino J.

Early detection of cancer is critical for improving patient survival rates, reducing morbidity and minimizing treatment costs. This study explores the use of multiphoton microscopy to enhance colorectal cancer detection, by using two-photon excitation fuorescence of intrinsic fuorophores. The diagnostic capability of this technique hinges on two key metabolic enzymes, nicotinamide adenine dinucleotide and favin...


Fabrication, electrochemical characterization, and In vivo validation of a flex...

Freitas, João R.; Rodrigues, José Artur Oliveira; Machado, João L.; Aguiar, Leandro Alvaro Alcantara; Rodrigues, Ana João; Oliveira, João F.

The use of flexible neural probes for brain recordings presents several advantages compared to rigid neural probes. The main advantage is related to the reduction of damage to the neural tissue when using a flexible invasive neural probe. This work presents the fabrication, characterization, and in vivo validation of a flexible neural probe fabricated with photosensitive and low-temperature cured polyimide. The...


Quantum optics activities at MNFabLab-CMEMS-UMinho

Cunha, Florival Moura; Pereira, Hugo Martins; Vieira, Eliana Maria Fernandes; Maciel, Marino Jesus Correia; Dores, Bernardo Santos; Domingues, Ana R.

[Introduction] In the Micro Nano Fabrication Laboratory (MNFabLab) at the Center for MicroElectroMechanical Systems (CMEMS) of the University of Minho (UMinho) operation at the atomic level is done with Atomic Layer Deposition (ALD) system, which offers both thermal and plasma options for depositing oxides and nitrides materials, essential for quantum optics applications [1].[...]


Label-free optical biopsy of colorectal phantoms using a custom-made multi-phot...

Freitas, R. B.; Rodrigues, M. J. L. F.; Cunha, N. F.; Pimenta, S.; Belsley, M.; Correia, J. H.; Maciel, M. J.

Colorectal cancer is a global health concern, emphasizing the need for early detection tools (Xi and Xu, 2021). Endogenous fluorophores such as nicotinamide adenine dinucleotide (phosphate) (NAD(P)H) and flavin adenine dinucleotide (FAD) play essential roles in cellular metabolism. Their fluorescence signals can reveal metabolic changes in tumoral tissues (Lakowicz, 2006; Benninger and Piston, 2013; Cao, Wallra...


Quantum optics activities at MNFabLab-CMEMS-UMinho

Cunha, Florival Moura; Pereira, Hugo Martins; Vieira, Eliana Maria Fernandes; Maciel, Marino Jesus Correia; Dores, Bernardo Santos; Domingues, Ana R.

This abstract shows the quantum optics activities at the Micro Nano Fabrication Laboratory (MNFabLab) at the Center for MicroElectroMechanical Systems (CMEMS) of the University of Minho (UMinho). In the MNFabLab operation at the atomic level is done with Atomic Layer Deposition (ALD) system, which offers both thermal and plasma options for depositing oxides and nitrides materials, essential for quantum optics a...


PEALD of SiNx using bis(diethylamino)silane (BDEAS) precursor with N2-plasma

Cunha, Florival Moura; Silva, Manuel Fernando Ribeiro; Correia, J. H.


An optical wireless communication system for physiological data transmission in...

Domingues, Ana R.; Pereira, Diogo; Silva, Manuel Fernando Ribeiro; Pimenta, Sara Filomena Ribeiro; Correia, J. H.

In biomedical research, telemetry is used to take automated physiological measurements wirelessly from animals, as it reduces their stress and allows recordings for large data collection over long periods. The ability to transmit high-throughput data from an in-body device (e.g., implantable systems, endoscopic capsules) to external devices can also be achieved by radiofrequency (RF), a standard wireless commun...


Microfabrication of rubidium-85 vapor cell for optically pumped magnetometer ap...

Pereira, Hugo Martins; Dores, B. S.; Silva, J. P. O.; Venâncio, Armando; Cerqueira, M. F.; Rodrigues, J. A.; Correia, J. H.

Neuroimaging methods have contributed to enhancing the knowledge of human brain activity. Magnetoencephalography is a general neuroimaging method that typically uses superconducting quantum interference devices as brain magnetic field sensors that require cryogenic cooling, putting practical and economical limitations. Optically pumped magnetometers are a promising alternative based on the use of atomic vapor c...


Silicon Nitride ultra-thin films by Plasma-Enhanced ALD using BDEAS as precurso...

Cunha, Florival Moura; Pedrosa, Gabriel A.; Silva, Manuel Fernando Ribeiro; Correia, J. H.

[Excerto] Silicon nitride (SiNx) ultra-thin films are essential for semiconductor and photonic integrated circuits (PIC) applications, particularly where a high refractive index and low-temperature processing are required. • The SiNx ultra-thin films were deposited by plasma- enhanced atomic layer deposition (PEALD) using bis(diethylamino)silane (BDEAS) and N2-plasma, and investigated with a focus on the impact...


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