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Quantum optics activities at MNFabLab-CMEMS-UMinho

Cunha, Florival Moura; Pereira, Hugo Martins; Vieira, Eliana Maria Fernandes; Maciel, Marino Jesus Correia; Dores, Bernardo Santos; Domingues, Ana R.

[Introduction] In the Micro Nano Fabrication Laboratory (MNFabLab) at the Center for MicroElectroMechanical Systems (CMEMS) of the University of Minho (UMinho) operation at the atomic level is done with Atomic Layer Deposition (ALD) system, which offers both thermal and plasma options for depositing oxides and nitrides materials, essential for quantum optics applications [1].[...]

Date: 2025   |   Origin: RepositóriUM - Universidade do Minho
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Quantum optics activities at MNFabLab-CMEMS-UMinho

Cunha, Florival Moura; Pereira, Hugo Martins; Vieira, Eliana Maria Fernandes; Maciel, Marino Jesus Correia; Dores, Bernardo Santos; Domingues, Ana R.

This abstract shows the quantum optics activities at the Micro Nano Fabrication Laboratory (MNFabLab) at the Center for MicroElectroMechanical Systems (CMEMS) of the University of Minho (UMinho). In the MNFabLab operation at the atomic level is done with Atomic Layer Deposition (ALD) system, which offers both thermal and plasma options for depositing oxides and nitrides materials, essential for quantum optics a...

Date: 2025   |   Origin: RepositóriUM - Universidade do Minho
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