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Fabrication of a MEMS micromirror based on bulk silicon micromachining combined...

Garcia, Ines S.; Ferreira, Carlos; Santos, Joana D.; Martins, Marcos Silva; Dias, Rosana Maria Alves; Aguiam, Diogo E.; Cabral, Jorge; Gaspar, Joao

A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing a novel fabrication process. This novel micromachining process combines typical SOI-based bulk micromachining and grayscale lithography, enabling the fabrication of combs actuators with asymmetric heights using a single lithography ste...

Date: 2020   |   Origin: RepositóriUM - Universidade do Minho
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