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Molybdenum oxide thin films grown on flexible ITO-coated PET substrates

Marciel, Alice; Graça, Manuel; Bastos, Alexandre; Pereira, Luiz; Suresh Kumar, Jakka; Borges, Joel; Vaz, F.; Peres, Marco; Magalhães, Sergio

Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O<sub>2</sub>/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous na...

Date: 2021 | Origin: RepositóriUM - Universidade do Minho

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