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Fabrication and electrical characterization of low-temperature polysilicon film...
Mota, Filipa C.; Garcia, Inês S.; Retolaza, Aritz; Santos, Dimitri E.; Sousa, Patrícia C.; Aguiam, Diogo E.; Dias, Rosana A.; Calaza, CarlosThe development of low-temperature piezoresistive materials provides compatibility with standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such material in flexible substrates, thereby expanding the potential for various device applications. This work demonstrates, for the first time, the fabrication of a 200 nm polycrystalline silicon thin film through a metal-induced crysta...
Date: 2025
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Origin: RepositóriUM - Universidade do Minho