The influence of substrate type in boosting thermoelectric properties of co-evaporated Bi2Te3 and Sb2Te3 films (with 400 nm-thick) is here reported. Optimized power factor values are 2.7 × 10<sup>−3</sup> W K<sup>−2</sup> m<sup>−1</sup> and 1.4 × 10<sup>−3</sup> W K<sup>−2</sup> m<sup>−1</sup> for flexible Bi2Te3 and Sb2Te3 films, respectively. This is an important result as it is at least 2 times higher than t...