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Novel magnetic readout for hybrid spintronic MEMS devices

Dias, Rosana A.; Moreira, Eurico Esteves; Ribeiro, Igor; Costa, Margaret; Fonseca, Helder; Cardoso, Susana; Freitas, Paulo

This digest reports for the first time on the concept, fabrication and characterization of a spintronics magnetic readout for hybrid MEMS. The method uses magnetic sensors (spin valves) and permanent magnets (on both the movable and the fixed parts of the MEMS structure) to detect displacement. The use of such transduction method has several potential advantages: it allows a small form factor, straightforward r...


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