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Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin...

This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From reactions between oxygen and the heated metal filament, volatile oxide species, Me xOy, where Me is the metal, can be f...