Fe-doped TiO2 thin films are deposited both on the (1 0 0) oriented Si and glass substrates by pulsed laser deposition technique using Fe powder doped TiO2 ceramic target. The structural and optical properties of the film have been studied in detail. The degree of film crystallinity is investigated by X-ray diffraction and confirmed by Raman scattering measurements. The stoichiometry and chemical states of Fe, ...