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Tribological testing of self-mated nanocrystalline diamond coatings on Si3N 4 c...
Abreu, C. S.; Amaral, M.; Oliveira, F. J.; Tallaire, A.; Bénédic, F.; Syll, O.; Cicala, G.; Gomes, J. R.; Silva, R. F.Due to their much lower surface roughness compared to that of microcrystalline diamond, nanocrystalline diamond (NCD) films are promising candidates for tribological applications in particular when deposited on hard ceramic materials such as silicon nitride (Si3N4). In the present work, microwave plasma assisted chemical vapour deposition of NCD is achieved using Ar/H2/CH4 gas mixtures on plates and ball-shaped...
Date: 2006
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Origin: RepositóriUM - Universidade do Minho