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The effect of the ion beam energy on the properties of indium tin oxide thin fi...

Meng Lijian; Gao Jinsong; Santos, M. P. dos; Wang Xiaoyi; Wang Tongtong

Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films h...

Date: 2008   |   Origin: RepositóriUM - Universidade do Minho
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