Publicação
Multifunctional hard coatings based on CrNx for temperature sensing applications
| Resumo: | This paper presents reports on the preparation of a multifunctional coating system, CrNx, with temperature sensing capability. A systematic study of the thermo-resistive effect of chromium nitride (CrNx) thin films with a negative temperature coefficient of resistance (TCR) has been carried out. The CrNx nanostructures were grown by reactive magnetron sputtering under distinct Ar+N2 conditions. To confer a zigzag columnar morphology to the CrNx we explored the oblique angle deposition technique. The structural properties have been studied through X-ray diffraction and Scanning Electron Microscopy. The thermo-resistive response was evaluated by measuring the electrical resistivity as a function of temperature by the twopoint method. The results observed for the CrNx films produced with N2 flux between 4 and 8 sccm present an stable and negative TCR. Values of -9.1710-4 , -5.3110-3 , and -1.47610-2 were observed for the films grown with 4, 6, and 8 sccm, respectively. The grain-boundary was used to theoretically describe our results. The results open new technological possibilities for the application of CrNx coatings for esistive temperature detector (RTD) systems. |
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| Autores principais: | Ferreira, Armando José Barros |
| Outros Autores: | Correa, Marcio A.; Silva, João Paulo; Correia, Daniela Maria Silva; Lanceros-Méndez, S.; Vaz, F. |
| Assunto: | Multifunctional hard coatings DC sputtering Temperature Coefficient of Resistance Thermal properties Temperature sensing |
| Ano: | 2021 |
| País: | Portugal |
| Tipo de documento: | artigo |
| Tipo de acesso: | acesso restrito |
| Instituição associada: | Universidade do Minho |
| Idioma: | inglês |
| Origem: | RepositóriUM - Universidade do Minho |
| Resumo: | This paper presents reports on the preparation of a multifunctional coating system, CrNx, with temperature sensing capability. A systematic study of the thermo-resistive effect of chromium nitride (CrNx) thin films with a negative temperature coefficient of resistance (TCR) has been carried out. The CrNx nanostructures were grown by reactive magnetron sputtering under distinct Ar+N2 conditions. To confer a zigzag columnar morphology to the CrNx we explored the oblique angle deposition technique. The structural properties have been studied through X-ray diffraction and Scanning Electron Microscopy. The thermo-resistive response was evaluated by measuring the electrical resistivity as a function of temperature by the twopoint method. The results observed for the CrNx films produced with N2 flux between 4 and 8 sccm present an stable and negative TCR. Values of -9.1710-4 , -5.3110-3 , and -1.47610-2 were observed for the films grown with 4, 6, and 8 sccm, respectively. The grain-boundary was used to theoretically describe our results. The results open new technological possibilities for the application of CrNx coatings for esistive temperature detector (RTD) systems. |
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