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CMOS X-ray imager for dental radiography

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Resumo:This paper describes a 64 pixels X-ray imager architecture and fabrication process. The imager is composed by a 8×8 photodiodes array, fabricated in CMOS process, and an array of wells £lled with scintillating crystals. A thick-£lm of aluminum is etched in order to achieve square wells with 500 um depth. The wells are filled with CsI:Tl scintillating crystals and placed above the photodiodes. The scintillating crystals convert the X-ray energy into visible light, which is guided into the photodiodes by the re¤ective aluminum walls, avoiding crosstalk between adjacent detectors. Usually, the spatial resolution of the scintillating x-rays detectors is identical to the scintillators thickness. By using the light guides, the scintillator thickness can be adjusted in order to achieve optimal absorption ef£ciency, since the spatial resolution is established by the pixel size (200 um side).
Autores principais:Ramos, N. F.
Outros Autores:Rocha, J. G.; Lanceros-Méndez, S.; Wolffenbuttel, R. F.; Correia, J. H.
Assunto:X-ray Digital radiology Scintillator Etching
Ano:2003
País:Portugal
Tipo de documento:comunicação em conferência
Tipo de acesso:acesso aberto
Instituição associada:Universidade do Minho
Idioma:inglês
Origem:RepositóriUM - Universidade do Minho
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author Ramos, N. F.
author2 Rocha, J. G.
Lanceros-Méndez, S.
Wolffenbuttel, R. F.
Correia, J. H.
author2_role author
author
author
author
author_facet Ramos, N. F.
Rocha, J. G.
Lanceros-Méndez, S.
Wolffenbuttel, R. F.
Correia, J. H.
author_role author
contributor_name_str_mv RepositóriUM - Universidade do Minho
country_str PT
creators_json_txt [{\"Person.name\":\"Ramos, N. F.\"},{\"Person.name\":\"Rocha, J. G.\"},{\"Person.name\":\"Lanceros-Méndez, S.\"},{\"Person.name\":\"Wolffenbuttel, R. F.\"},{\"Person.name\":\"Correia, J. H.\"}]
datacite.contributors.contributor.contributorName.fl_str_mv RepositóriUM - Universidade do Minho
datacite.creators.creator.creatorName.fl_str_mv Ramos, N. F.
Rocha, J. G.
Lanceros-Méndez, S.
Wolffenbuttel, R. F.
Correia, J. H.
datacite.date.Accepted.fl_str_mv 2003-09-01T00:00:00Z
datacite.date.available.fl_str_mv 2006-02-01T11:44:14Z
datacite.date.embargoed.fl_str_mv 2006-02-01T11:44:14Z
datacite.rights.fl_str_mv http://purl.org/coar/access_right/c_abf2
datacite.subjects.subject.fl_str_mv X-ray
Digital radiology
Scintillator
Etching
datacite.titles.title.fl_str_mv CMOS X-ray imager for dental radiography
dc.contributor.none.fl_str_mv RepositóriUM - Universidade do Minho
dc.creator.none.fl_str_mv Ramos, N. F.
Rocha, J. G.
Lanceros-Méndez, S.
Wolffenbuttel, R. F.
Correia, J. H.
dc.date.Accepted.fl_str_mv 2003-09-01T00:00:00Z
dc.date.available.fl_str_mv 2006-02-01T11:44:14Z
dc.date.embargoed.fl_str_mv 2006-02-01T11:44:14Z
dc.format.none.fl_str_mv application/pdf
dc.identifier.none.fl_str_mv https://hdl.handle.net/1822/4286
dc.language.none.fl_str_mv eng
dc.publisher.none.fl_str_mv Universidade do Minho
dc.rights.none.fl_str_mv http://purl.org/coar/access_right/c_abf2
dc.subject.none.fl_str_mv X-ray
Digital radiology
Scintillator
Etching
dc.title.fl_str_mv CMOS X-ray imager for dental radiography
dc.type.none.fl_str_mv http://purl.org/coar/resource_type/c_5794
description This paper describes a 64 pixels X-ray imager architecture and fabrication process. The imager is composed by a 8×8 photodiodes array, fabricated in CMOS process, and an array of wells £lled with scintillating crystals. A thick-£lm of aluminum is etched in order to achieve square wells with 500 um depth. The wells are filled with CsI:Tl scintillating crystals and placed above the photodiodes. The scintillating crystals convert the X-ray energy into visible light, which is guided into the photodiodes by the re¤ective aluminum walls, avoiding crosstalk between adjacent detectors. Usually, the spatial resolution of the scintillating x-rays detectors is identical to the scintillators thickness. By using the light guides, the scintillator thickness can be adjusted in order to achieve optimal absorption ef£ciency, since the spatial resolution is established by the pixel size (200 um side).
dirty 0
eu_rights_str_mv openAccess
format conferencePaper
fulltext.url.fl_str_mv https://repositorium.uminho.pt/bitstreams/ce57a720-4132-464e-b26e-3ec7c8f54685/download
id rum_bb75c6a47c19d7f2408c94274d508b4b
identifier.url.fl_str_mv https://hdl.handle.net/1822/4286
instacron_str repositorium
institution Universidade do Minho
instname_str Universidade do Minho
language eng
network_acronym_str rum
network_name_str RepositóriUM - Universidade do Minho
oai_identifier_str oai:repositorium.uminho.pt:1822/4286
organization_str_mv urn:organizationAcronym:repositorium
person_str_mv Ramos, N. F.
Rocha, J. G.
Lanceros-Méndez, S.
Wolffenbuttel, R. F.
Correia, J. H.
publishDate 2003
publisher.none.fl_str_mv Universidade do Minho
reponame_str RepositóriUM - Universidade do Minho
repository_id_str urn:repositoryAcronym:rum
service_str_mv urn:repositoryAcronym:rum
spelling engUniversidade do MinhoengThis paper describes a 64 pixels X-ray imager architecture and fabrication process. The imager is composed by a 8×8 photodiodes array, fabricated in CMOS process, and an array of wells £lled with scintillating crystals. A thick-£lm of aluminum is etched in order to achieve square wells with 500 um depth. The wells are filled with CsI:Tl scintillating crystals and placed above the photodiodes. The scintillating crystals convert the X-ray energy into visible light, which is guided into the photodiodes by the re¤ective aluminum walls, avoiding crosstalk between adjacent detectors. Usually, the spatial resolution of the scintillating x-rays detectors is identical to the scintillators thickness. By using the light guides, the scintillator thickness can be adjusted in order to achieve optimal absorption ef£ciency, since the spatial resolution is established by the pixel size (200 um side).application/pdfengCMOS X-ray imager for dental radiographyRamos, N. F.Rocha, J. G.Lanceros-Méndez, S.Wolffenbuttel, R. F.Correia, J. H.HostingInstitutionOrganizationalRepositóriUM - Universidade do Minhoe-mailmailto:repositorium@usdb.uminho.ptrepositorium@usdb.uminho.ptCITATIONEUROSENSORS, 17, Guimarães, 2003 - "Eurosensors : Proceedings of the European Conference on Solid-State Transducers". [Guimarães]: Universidade do Minho, 2003. ISBN 972-98603-1-9. p. 208-209.ISBNIsPartOf972-98603-1-92006-02-01T11:44:14Z2003-092003-09-01T00:00:00ZHandlehttps://hdl.handle.net/1822/4286http://purl.org/coar/access_right/c_abf2open accessX-rayDigital radiologyScintillatorEtching1083003 bytesother research producthttp://purl.org/coar/resource_type/c_5794conference paperhttp://purl.org/coar/access_right/c_abf2application/pdffulltexthttps://repositorium.uminho.pt/bitstreams/ce57a720-4132-464e-b26e-3ec7c8f54685/download
spellingShingle CMOS X-ray imager for dental radiography
Ramos, N. F.
X-ray
Digital radiology
Scintillator
Etching
status SINGLETON
subject.fl_str_mv X-ray
Digital radiology
Scintillator
Etching
title CMOS X-ray imager for dental radiography
title_full CMOS X-ray imager for dental radiography
title_fullStr CMOS X-ray imager for dental radiography
title_full_unstemmed CMOS X-ray imager for dental radiography
title_short CMOS X-ray imager for dental radiography
title_sort CMOS X-ray imager for dental radiography
topic X-ray
Digital radiology
Scintillator
Etching
topic_facet X-ray
Digital radiology
Scintillator
Etching
url https://hdl.handle.net/1822/4286
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