Autor(es): Dias, Rosana A. ; Moreira, Eurico Esteves ; Ribeiro, Igor ; Costa, Margaret ; Fonseca, Helder ; Cardoso, Susana ; Freitas, Paulo ; Rocha, Luís Alexandre Machado ; Gaspar, João
Data: 2017
Identificador Persistente: https://hdl.handle.net/1822/50706
Origem: RepositóriUM - Universidade do Minho
Assunto(s): Spintronics; Magnetic readout; MEMS; Displacement sensing
This digest reports for the first time on the concept, fabrication and characterization of a spintronics magnetic readout for hybrid MEMS. The method uses magnetic sensors (spin valves) and permanent magnets (on both the movable and the fixed parts of the MEMS structure) to detect displacement. The use of such transduction method has several potential advantages: it allows a small form factor, straightforward readout electronics, xyz integrability, and does not require high aspect ratio silicon gaps, allowing the replacement of conventional capacitive transductors by a mechanism that occupies much less chip area. The proof-of-concept is presented for an in-plane movable structure. Both the full-gap linear displacement and the electrostatic pull-in behavior are monitored and displayed.
