Publicação
2D fluid approaches of DC magnetron discharge
| Resumo: | A two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of Boltzmann equation: continuity, momentum transfer and mean energy transfer (the latter one only for electrons), coupled with Poisson equation. An original way is proposed to treat the transport equations. Electron and ion momentum transport equations are reduced to the classical drift-diffusion expression of the fluxes since the presence of the magnetic field is introduced as an additional part in the electron flux, while for ions an effective electric field was considered. Thus, both continuity and mean energy transfer equations are solved in a classical manner. Numerical simulations were performed considering Argon as buffer gas, with a neutral pressure varying between 5 and 30 mtorr, a gas temperature from 300 to 350 K and cathode voltages lying from -200 up to -600 V. Results obtained for densities of the charged particle, fluxes and plasma potential are in good agreement with previous works. |
|---|---|
| Autores principais: | Costin, C. |
| Outros Autores: | Marques, L.; Popa, G.; Gousset, G. |
| Assunto: | Magnetron discharge Numerical modelling Fluid model |
| Ano: | 2005 |
| País: | Portugal |
| Tipo de documento: | artigo |
| Tipo de acesso: | acesso aberto |
| Instituição associada: | Universidade do Minho |
| Idioma: | inglês |
| Origem: | RepositóriUM - Universidade do Minho |
| _version_ | 1867438251515576320 |
|---|---|
| author | Costin, C. |
| author2 | Marques, L. Popa, G. Gousset, G. |
| author2_role | author author author |
| author_facet | Costin, C. Marques, L. Popa, G. Gousset, G. |
| author_role | author |
| contributor_name_str_mv | RepositóriUM - Universidade do Minho |
| country_str | PT |
| creators_json_txt | [{\"Person.name\":\"Costin, C.\"},{\"Person.name\":\"Marques, L.\"},{\"Person.name\":\"Popa, G.\"},{\"Person.name\":\"Gousset, G.\"}] |
| datacite.contributors.contributor.contributorName.fl_str_mv | RepositóriUM - Universidade do Minho |
| datacite.creators.creator.creatorName.fl_str_mv | Costin, C. Marques, L. Popa, G. Gousset, G. |
| datacite.date.Accepted.fl_str_mv | 2005-01-01T00:00:00Z |
| datacite.date.available.fl_str_mv | 2006-01-05T12:29:03Z |
| datacite.date.embargoed.fl_str_mv | 2006-01-05T12:29:03Z |
| datacite.rights.fl_str_mv | http://purl.org/coar/access_right/c_abf2 |
| datacite.subjects.subject.fl_str_mv | Magnetron discharge Numerical modelling Fluid model |
| datacite.titles.title.fl_str_mv | 2D fluid approaches of DC magnetron discharge |
| dc.contributor.none.fl_str_mv | RepositóriUM - Universidade do Minho |
| dc.creator.none.fl_str_mv | Costin, C. Marques, L. Popa, G. Gousset, G. |
| dc.date.Accepted.fl_str_mv | 2005-01-01T00:00:00Z |
| dc.date.available.fl_str_mv | 2006-01-05T12:29:03Z |
| dc.date.embargoed.fl_str_mv | 2006-01-05T12:29:03Z |
| dc.format.none.fl_str_mv | application/pdf |
| dc.identifier.none.fl_str_mv | https://hdl.handle.net/1822/3817 |
| dc.language.none.fl_str_mv | eng |
| dc.publisher.none.fl_str_mv | IOP Publishing |
| dc.rights.none.fl_str_mv | http://purl.org/coar/access_right/c_abf2 |
| dc.subject.none.fl_str_mv | Magnetron discharge Numerical modelling Fluid model |
| dc.title.fl_str_mv | 2D fluid approaches of DC magnetron discharge |
| dc.type.none.fl_str_mv | http://purl.org/coar/resource_type/c_6501 |
| description | A two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of Boltzmann equation: continuity, momentum transfer and mean energy transfer (the latter one only for electrons), coupled with Poisson equation. An original way is proposed to treat the transport equations. Electron and ion momentum transport equations are reduced to the classical drift-diffusion expression of the fluxes since the presence of the magnetic field is introduced as an additional part in the electron flux, while for ions an effective electric field was considered. Thus, both continuity and mean energy transfer equations are solved in a classical manner. Numerical simulations were performed considering Argon as buffer gas, with a neutral pressure varying between 5 and 30 mtorr, a gas temperature from 300 to 350 K and cathode voltages lying from -200 up to -600 V. Results obtained for densities of the charged particle, fluxes and plasma potential are in good agreement with previous works. |
| dirty | 0 |
| eu_rights_str_mv | openAccess |
| format | article |
| fulltext.url.fl_str_mv | https://repositorium.uminho.pt/bitstreams/d0847682-47df-49ce-9a1b-39bc23173da3/download |
| id | rum_1654fdca986fe7bb6938e4e90f906421 |
| identifier.url.fl_str_mv | https://hdl.handle.net/1822/3817 |
| instacron_str | repositorium |
| institution | Universidade do Minho |
| instname_str | Universidade do Minho |
| language | eng |
| network_acronym_str | rum |
| network_name_str | RepositóriUM - Universidade do Minho |
| oai_identifier_str | oai:repositorium.uminho.pt:1822/3817 |
| organization_str_mv | urn:organizationAcronym:repositorium |
| person_str_mv | Costin, C. Marques, L. Popa, G. Gousset, G. |
| publishDate | 2005 |
| publisher.none.fl_str_mv | IOP Publishing |
| reponame_str | RepositóriUM - Universidade do Minho |
| repository_id_str | urn:repositoryAcronym:rum |
| service_str_mv | urn:repositoryAcronym:rum |
| spelling | engIOP PublishingengA two dimensional (r,z) time-dependent fluid model was developed and used to describe a DC planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of Boltzmann equation: continuity, momentum transfer and mean energy transfer (the latter one only for electrons), coupled with Poisson equation. An original way is proposed to treat the transport equations. Electron and ion momentum transport equations are reduced to the classical drift-diffusion expression of the fluxes since the presence of the magnetic field is introduced as an additional part in the electron flux, while for ions an effective electric field was considered. Thus, both continuity and mean energy transfer equations are solved in a classical manner. Numerical simulations were performed considering Argon as buffer gas, with a neutral pressure varying between 5 and 30 mtorr, a gas temperature from 300 to 350 K and cathode voltages lying from -200 up to -600 V. Results obtained for densities of the charged particle, fluxes and plasma potential are in good agreement with previous works.application/pdfeng2D fluid approaches of DC magnetron dischargeCostin, C.Marques, L.Popa, G.Gousset, G.HostingInstitutionOrganizationalRepositóriUM - Universidade do Minhoe-mailmailto:repositorium@usdb.uminho.ptrepositorium@usdb.uminho.ptCITATION"Plasma Sources Science and Tecnhology". ISSN 0963-0252. 14 (2005) 168-176.ISSNIsPartOf0963-02522006-01-05T12:29:03Z20052005-01-01T00:00:00ZHandlehttps://hdl.handle.net/1822/3817http://purl.org/coar/access_right/c_abf2open accessMagnetron dischargeNumerical modellingFluid model657026 bytesliteraturehttp://purl.org/coar/resource_type/c_6501journal articlehttp://purl.org/coar/access_right/c_abf2application/pdffulltexthttps://repositorium.uminho.pt/bitstreams/d0847682-47df-49ce-9a1b-39bc23173da3/download |
| spellingShingle | 2D fluid approaches of DC magnetron discharge Costin, C. Magnetron discharge Numerical modelling Fluid model |
| status | SINGLETON |
| subject.fl_str_mv | Magnetron discharge Numerical modelling Fluid model |
| title | 2D fluid approaches of DC magnetron discharge |
| title_full | 2D fluid approaches of DC magnetron discharge |
| title_fullStr | 2D fluid approaches of DC magnetron discharge |
| title_full_unstemmed | 2D fluid approaches of DC magnetron discharge |
| title_short | 2D fluid approaches of DC magnetron discharge |
| title_sort | 2D fluid approaches of DC magnetron discharge |
| topic | Magnetron discharge Numerical modelling Fluid model |
| topic_facet | Magnetron discharge Numerical modelling Fluid model |
| url | https://hdl.handle.net/1822/3817 |
| visible | 1 |