Detalhes bibliográficos
| Resumo: | The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value. |
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| Autores principais: | Dias, R. A. |
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| Outros Autores: | Cretu, E.; Wolffenbuttel, R. F.; Rocha, Luís A. |
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| Assunto: | Squeeze-film damping Air channels MEMS capacitive sensing |
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| Ano: | 2011 |
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| País: | Portugal |
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| Tipo de documento: | comunicação em conferência |
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| Tipo de acesso: | acesso restrito |
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| Instituição associada: | Universidade do Minho |
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| Idioma: | inglês |
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| Origem: | RepositóriUM - Universidade do Minho |
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