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Squeeze-film damper design with air channels : experimental verification

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Resumo:The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value.
Autores principais:Dias, R. A.
Outros Autores:Cretu, E.; Wolffenbuttel, R. F.; Rocha, Luís A.
Assunto:Squeeze-film damping Air channels MEMS capacitive sensing
Ano:2011
País:Portugal
Tipo de documento:comunicação em conferência
Tipo de acesso:acesso restrito
Instituição associada:Universidade do Minho
Idioma:inglês
Origem:RepositóriUM - Universidade do Minho

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