Publicação
Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems
| Resumo: | This paper presents the fabrication of an array of high aspect ratio photoresist based refractive microlenses (ML) using photolithography and thermal reflow. First, and in order to evaluate and predict the MLs optical properties and physical dimensions, finite element analysis was done. These simulations helped to design the super high resolution chrome on soda lime glass photomask as well as the parameters for the lithographic processes. Then, an array of high aspect ratio structures (length 4.9 mm, width 30 μm and 5 μm spacing between adjacent structures) with 5 μm thickness were fabricated. The thermal reflow technique (using a hotplate) was applied and an array of MLs measuring 5 and 32 μm at the vertex and radius, respectively, was achieved. When the photoresist (PR) is heated up above its glass transition temperature, it melts and the surface tension effect causes the fabricated microstructure to obtain the spherical lens profile. The hotplate thermal reflow is simple and easy to control, thus permitting the fabrication of smooth and homogeneous surfaces essential for good quality refractive microlenses. |
|---|---|
| Autores principais: | Rocha, R. P. |
| Outros Autores: | Carmo, João Paulo Pereira; Correia, J. H.; Gomes, J. M. |
| Assunto: | Microlenses array Photolithography Photoresist Thermal reflow |
| Ano: | 2012 |
| País: | Portugal |
| Tipo de documento: | comunicação em conferência |
| Tipo de acesso: | acesso aberto |
| Instituição associada: | Universidade do Minho |
| Idioma: | inglês |
| Origem: | RepositóriUM - Universidade do Minho |
| _version_ | 1866270168100896768 |
|---|---|
| author | Rocha, R. P. |
| author2 | Carmo, João Paulo Pereira Correia, J. H. Gomes, J. M. |
| author2_role | author author author |
| author_facet | Rocha, R. P. Carmo, João Paulo Pereira Correia, J. H. Gomes, J. M. |
| author_role | author |
| contributor_name_str_mv | Universidade do Minho |
| country_str | PT |
| creators_json_txt | [{\"Person.name\":\"Rocha, R. P.\"},{\"Person.name\":\"Carmo, João Paulo Pereira\"},{\"Person.name\":\"Correia, J. H.\"},{\"Person.name\":\"Gomes, J. M.\"}] |
| datacite.contributors.contributor.contributorName.fl_str_mv | Universidade do Minho |
| datacite.creators.creator.creatorName.fl_str_mv | Rocha, R. P. Carmo, João Paulo Pereira Correia, J. H. Gomes, J. M. |
| datacite.date.Accepted.fl_str_mv | 2012-01-01T00:00:00Z |
| datacite.date.available.fl_str_mv | 2012-12-21T18:01:10Z |
| datacite.date.embargoed.fl_str_mv | 2012-12-21T18:01:10Z |
| datacite.rights.fl_str_mv | http://purl.org/coar/access_right/c_abf2 |
| datacite.subjects.subject.fl_str_mv | Microlenses array Photolithography Photoresist Thermal reflow |
| datacite.titles.title.fl_str_mv | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| dc.contributor.none.fl_str_mv | Universidade do Minho |
| dc.creator.none.fl_str_mv | Rocha, R. P. Carmo, João Paulo Pereira Correia, J. H. Gomes, J. M. |
| dc.date.Accepted.fl_str_mv | 2012-01-01T00:00:00Z |
| dc.date.available.fl_str_mv | 2012-12-21T18:01:10Z |
| dc.date.embargoed.fl_str_mv | 2012-12-21T18:01:10Z |
| dc.format.none.fl_str_mv | application/pdf |
| dc.identifier.none.fl_str_mv | https://hdl.handle.net/1822/22051 |
| dc.language.none.fl_str_mv | eng |
| dc.rights.none.fl_str_mv | http://purl.org/coar/access_right/c_abf2 |
| dc.subject.none.fl_str_mv | Microlenses array Photolithography Photoresist Thermal reflow |
| dc.title.fl_str_mv | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| dc.type.none.fl_str_mv | http://purl.org/coar/resource_type/c_5794 |
| description | This paper presents the fabrication of an array of high aspect ratio photoresist based refractive microlenses (ML) using photolithography and thermal reflow. First, and in order to evaluate and predict the MLs optical properties and physical dimensions, finite element analysis was done. These simulations helped to design the super high resolution chrome on soda lime glass photomask as well as the parameters for the lithographic processes. Then, an array of high aspect ratio structures (length 4.9 mm, width 30 μm and 5 μm spacing between adjacent structures) with 5 μm thickness were fabricated. The thermal reflow technique (using a hotplate) was applied and an array of MLs measuring 5 and 32 μm at the vertex and radius, respectively, was achieved. When the photoresist (PR) is heated up above its glass transition temperature, it melts and the surface tension effect causes the fabricated microstructure to obtain the spherical lens profile. The hotplate thermal reflow is simple and easy to control, thus permitting the fabrication of smooth and homogeneous surfaces essential for good quality refractive microlenses. |
| dirty | 0 |
| eu_rights_str_mv | openAccess |
| format | conferencePaper |
| fulltext.url.fl_str_mv | https://prod-dspace.uminho.pt/bitstreams/f519b60f-f565-4306-a98c-7716969ba3c3/download |
| id | rum_6da458ed54a8469c0a29e2be7feb0a21 |
| identifier.url.fl_str_mv | https://hdl.handle.net/1822/22051 |
| instacron_str | repositorium |
| institution | Universidade do Minho |
| instname_str | Universidade do Minho |
| language | eng |
| network_acronym_str | rum |
| network_name_str | RepositóriUM - Universidade do Minho |
| oai_identifier_str | oai:repositorium.uminho.pt:1822/22051 |
| organization_str_mv | urn:organizationAcronym:repositorium |
| person_str_mv | Rocha, R. P. Carmo, João Paulo Pereira Correia, J. H. Gomes, J. M. |
| publishDate | 2012 |
| reponame_str | RepositóriUM - Universidade do Minho |
| repository_id_str | urn:repositoryAcronym:rum |
| service_str_mv | urn:repositoryAcronym:rum |
| spelling | engporThis paper presents the fabrication of an array of high aspect ratio photoresist based refractive microlenses (ML) using photolithography and thermal reflow. First, and in order to evaluate and predict the MLs optical properties and physical dimensions, finite element analysis was done. These simulations helped to design the super high resolution chrome on soda lime glass photomask as well as the parameters for the lithographic processes. Then, an array of high aspect ratio structures (length 4.9 mm, width 30 μm and 5 μm spacing between adjacent structures) with 5 μm thickness were fabricated. The thermal reflow technique (using a hotplate) was applied and an array of MLs measuring 5 and 32 μm at the vertex and radius, respectively, was achieved. When the photoresist (PR) is heated up above its glass transition temperature, it melts and the surface tension effect causes the fabricated microstructure to obtain the spherical lens profile. The hotplate thermal reflow is simple and easy to control, thus permitting the fabrication of smooth and homogeneous surfaces essential for good quality refractive microlenses.application/pdfporFabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystemsRocha, R. P.Carmo, João Paulo PereiraCorreia, J. H.Gomes, J. M.HostingInstitutionOrganizationalUniversidade do Minhoe-mailmailto:repositorium@usdb.uminho.ptrepositorium@usdb.uminho.pt2012-12-21T18:01:10Z20122012-01-01T00:00:00ZHandlehttps://hdl.handle.net/1822/22051http://purl.org/coar/access_right/c_abf2open accessMicrolenses arrayPhotolithographyPhotoresistThermal reflow722669 bytesother research producthttp://purl.org/coar/resource_type/c_5794conference paperhttp://purl.org/coar/access_right/c_abf2application/pdffulltexthttps://prod-dspace.uminho.pt/bitstreams/f519b60f-f565-4306-a98c-7716969ba3c3/download |
| spellingShingle | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems Rocha, R. P. Microlenses array Photolithography Photoresist Thermal reflow |
| status | SINGLETON |
| subject.fl_str_mv | Microlenses array Photolithography Photoresist Thermal reflow |
| title | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| title_full | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| title_fullStr | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| title_full_unstemmed | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| title_short | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| title_sort | Fabrication of AZ4562 refractive microlenses array for light enhancement on optical microsystems |
| topic | Microlenses array Photolithography Photoresist Thermal reflow |
| topic_facet | Microlenses array Photolithography Photoresist Thermal reflow |
| url | https://hdl.handle.net/1822/22051 |
| visible | 1 |