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High resolution pull-in inclinometer

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Resumo:A MEMS high-resolution inclinometer is presented in this paper. Unlike traditional approaches, a transduction mechanism based on the measurement of pull-in voltages is used for the realization of the sensor. The advantage is on-device capability for auto-calibration and thermal compensation, and more relaxed specifications for the capacitive readout electronics. In addition, dedicated MEMS microstructures with extra proof-mass are proposed and tested for high-resolution applications. The microstructures have differential actuation electrodes (with a common electrode) resulting in two pull-in voltages that change differentially with applied acceleration. The device shows a sensitivity of 300 mV/º with a non-linearity below 0.5%FS (Full Scale of ±10º). The measured noise level of 3mV sets the system resolution at 0.01º, above the theoretical resolution limit of 0.001º (due to the actuation voltage resolution of 300μV).
Autores principais:Alves, F. S.
Outros Autores:Dias, R. A.; Cabral, Jorge; Gaspar, J.; Rocha, L. A.
Assunto:Pull-in Voltage MEMS Inclinometer FPGA
Ano:2013
País:Portugal
Tipo de documento:comunicação em conferência
Tipo de acesso:acesso restrito
Instituição associada:Universidade do Minho
Idioma:inglês
Origem:RepositóriUM - Universidade do Minho

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