Publicação

Automated reactive thermal evaporation system for transparent conductive coatings

Detalhes bibliográficos
Resumo:	This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates.
Autores principais:	Fernandes, Miguel
Outros Autores:	Y. Vygranenko, Yuri; Vieira, Manuela; Lavareda, Guilherme; de Carvalho, Carlos Nunes; Amaral, Ana
Assunto:	Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate
Ano:	2017
País:	Portugal
Tipo de documento:	artigo
Tipo de acesso:	unknown
Instituição associada:	Instituto Superior de Engenharia de Lisboa
Idioma:	inglês
Origem:	i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers

Descrição
Resumo:	This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates.