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Lattice location and optical activation of rare earth implanted GaN

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Detalhes bibliográficos
Resumo:This paper reviews the current knowledge on rare earths (REs) implanted into GaN with a special focus on their lattice location and on the optical activation by means of thermal annealing. While emission channeling experiments have given information on the lattice location of rare earths following low-dose (≈1013cm-2) implantation, both in the as-implanted state and after annealing up to 900°C, the lattice location of higher-dose implants (1014-1015cm-2) and their defect annealing behaviour were studied using the Rutherford backscattering/channeling (RBS/C) method. The available channeling and luminescence results suggest that the optical activation of implanted REs in GaN is related to their incorporation in substitutional Ga sites combined with the effective removal of the implantation damage
Autores principais:Wahl, U.
Outros Autores:Alves, E.; Lorenz, K.; Correia, J.G.; Monteiro, T.; De Vries, B.; Vantomme, A.; Vianden, R.
Assunto:Channeling GaN Ion implantation Luminescence; Rare earth
Ano:2003
País:Portugal
Tipo de documento:artigo
Tipo de acesso:acesso restrito
Instituição associada:Universidade de Aveiro
Idioma:inglês
Origem:RIA - Repositório Institucional da Universidade de Aveiro
Descrição
Resumo:This paper reviews the current knowledge on rare earths (REs) implanted into GaN with a special focus on their lattice location and on the optical activation by means of thermal annealing. While emission channeling experiments have given information on the lattice location of rare earths following low-dose (≈1013cm-2) implantation, both in the as-implanted state and after annealing up to 900°C, the lattice location of higher-dose implants (1014-1015cm-2) and their defect annealing behaviour were studied using the Rutherford backscattering/channeling (RBS/C) method. The available channeling and luminescence results suggest that the optical activation of implanted REs in GaN is related to their incorporation in substitutional Ga sites combined with the effective removal of the implantation damage