Detalhes bibliográficos
| Resumo: | In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive readout. However, open-loop operation delivers very low dynamic range and highly non-linear response. The closed-loop approach relies on electrostatic feedback using counter-actuation electrodes opposite to the pull-in direction and although the control algorithm used was very simple, the dynamic range has been effectively extended and the linearity improved. |
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| Autores principais: | Dias, Rosana A. |
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| Outros Autores: | Wolffenbuttel, R. F.; Cretu, E.; Rocha, Luís A. |
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| Assunto: | Pull-In Accelerometer Closed-loop Electrostatic actuation |
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| Ano: | 2012 |
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| País: | Portugal |
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| Tipo de documento: | comunicação em conferência |
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| Tipo de acesso: | acesso restrito |
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| Instituição associada: | Universidade do Minho |
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| Idioma: | inglês |
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| Origem: | RepositóriUM - Universidade do Minho |
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