Detalhes bibliográficos
| Resumo: | In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the discharge about 40% when comparing with previous estimates using a simplified kinetics. |
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| Autores principais: | Marques, L. |
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| Outros Autores: | Salabas, A.; Gousset, G.; Alves, L. L. |
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| Assunto: | Modelling RF Vibrational Hydrogen Plasma |
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| Ano: | 2003 |
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| País: | Portugal |
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| Tipo de documento: | artigo |
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| Tipo de acesso: | acesso aberto |
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| Instituição associada: | Universidade do Minho |
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| Idioma: | inglês |
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| Origem: | RepositóriUM - Universidade do Minho |
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